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Machine Control (设备控制)
1. 网络设备由PLC I/O系统控制,可以实时检测 ( Profibus DP)
- Type Q-PLC (made by MITSUBISHI)
2. 卷绕驱动由AC servo driver system精密控制 (Tension Control)
3. Data transfer : Profibus DP interface with fiber optics (TMP, MF)
4. System Automation (系统自动化)
- Pumping Function (Ramp up/down)
- Deposition parameter storage(储存镀膜条件)
- Automatic process stop (错误发生时)
- 各产品自动升级(Recipe)
1.设备规格-1
◆ Material Thickness
- PET : 25 ~ 200㎛
◆ Roll Dimension
ITEM | Min | Max |
Width (膜宽幅) | 650mm | 1700mm |
Diameter | 900mm |
◆ Winding
ITEM | Description |
Web Speed | 0.5 .. 10m/min |
Unwind | 70 … 300N |
Rewind | 70 … 300N |
1.设备规格-2
◆ Vacuum Condition (真空度规格)
No | Description |
Base Pressure (基础真空度) | ≤ 7.0 × 10-6 mbar 이하 |
Process Pressure (工程真空度) | 1 … 7 × 10-3 mbar |
Venting Time (排气时间) | Approx. 20minutes |
◆ Machine Control (设备控制)
1.网络设备由PLC I/O系统控制,可以实时检测( Profibus DP)
- Type Q-PLC (made by MITSUBISHI)
2.卷绕驱动由AC servo driver system精密控制 (Tension Control)
3. Data transfer : Profibus DP interface with fiber optics (TMP, MF)
4. System Automation (系统自动化)
- Pumping Function (Ramp up/down)
- Deposition parameter storage(储存镀膜条件)
- Automatic process stop (错误发生时)
- 各产品自动升级(Recipe)
2. 设备装置-1
◆ Dimensions & Weight
ITEM | Description |
System Lay Out | Approx. 18000mm×22000mm |
Width (Chamber) | Approx. 8100mm |
Height (Chamber) | Approx. 3500mm |
Weight (Chamber) | Approx. 40,000kg |
•2Drum腔体为基准,根据设备规格装置也会变更。
◆ Electrical services
ITEM | Description |
Voltage | 380v ±10%, 50Hz, 3 Phase |
Average consumption | Approx. 500kw |
2. 设备装置-2
◆ Cooling Water Spec (冷却水装置)
ITEM | Description |
Inlet pressure (输入压力) | 4……6 bar |
Outlet pressure (输出压力) | 0.1…..1 bar, open drain |
Consumption | Max. 70m3/h Average 50 m3/h |
Temperature (Inlet) 输入温度 | Min : 17℃, Max : 23℃ |
Carbonate hardness 碳酸盐硬度 | < 6 … 8′dh |
pH valus | 8.5 … 10 |
CO2 content | Max 15 mg/l |
Cl content | Max 20 mg/l |
2. 设备制造-3
◆ Compressed air (空气)
ITEM | Description |
Pressure (压力) | 6 … 7 bar |
Average consumption | Approx. 1 m3/h |
Oil content | Max. 6 mg/m3 |
◆. 腔体构造

◆. Cathode & Cooling Drum 构造

◆ PEM system 持有控制技术